ID PW
 
* Join the Member of ICROS 
* Need your ID or Password?
 
 
 
Subject Keyword Abstract Author
 
 
Output-based Adaptive Iterative Learning Control of Uncertain Linear Systems Applied to a Wafer Stage

Mingsheng Cao*, Yumeng Bo, and Huibin Gao
International Journal of Control, Automation, and Systems, vol. 20, no. 3, pp.741-749, 2022

Abstract : Iterative learning control (ILC) is an efficient technique applicable to improving the tracking performance of systems that have a repetitive nature. In this paper, point-to-point movements with time-iteration-varying disturbances are considered instead. A new output-based adaptive ILC scheme consisting of an adaptive second-order ILC and an iterative learning estimation of time-iteration-varying disturbances is proposed for a class of linear systems with unknown parameters. The proposed algorithm is used to improve trajectory tracking performance without requiring a plant model or a sensitivity function, and without assuming the initial condition to be zero. In order to verify the proposed algorithm, it is applied to a wafer stage, and the obtained tracking performance is compared with that obtained using a traditional second-order ILC algorithm; better results are obtained using the proposed method.

Keyword : Iterative estimation, iterative learning control, time-iteration-varying disturbance, wafer stage.

 
Copyright ⓒ ICROS. All rights reserved.
Institute of Control, Robotics and Systems, Suseo Hyundai-Ventureville 723, Bamgogae-ro 1-gil 10, Gangnam-gu, Seoul 06349, Korea
Homepage http://eng.icros.org | Tel. +82-2-6949-5801 (ext. 3) | Fax. +82-2-6949-5807 | E-mail icros@icros.org